Equipments
MEMS Equipments
-Cleanroom (Class 100 & air shower, WoongBee. TS)
Description : Class 100 cleanroom with air shower
Manager : Taeyeong Kim
-High temperature vacuum furnace (ACE-vacuum)
Description : Graphite vacuum (DP) furnace
Manager : Taeyeong Kim
-High temperature horizontal furnace (WRHF-601D, Semitronics)
Description : Quartz tube furnace (Diameter : 20 cm, Length : 170 cm)
Manager : Taeyeong Kim
-Tube furnace
Description : Quartz tube furnace (Diameter : 5 cm, Length : 100 cm)
Manager : Kibum Jung
-Spin coater
Description : PR coating onto wafers or flat substrates
Manager : Minwoo Choi (moved to Prof. Bong Jae Lee’s Lab)
-Thermal evaporator
Description : Physical vapor deposition (PVD) onto wafers or substrates
Manager : Rafita
-Multi-purpose plasma processing system
Description : Plasma surface treatment (O2 gas connected)
Manager : Rafita
-Wire bonder
Description : Wire bonding system
Manager : Kibum Jung
Equipments
MEMS Equipments
Cleanroom (Class 100 & air shower, WoongBee. TS)
Description : Class 100 cleanroom with air shower
Manager : Taeyeong Kim
High temperature vacuum furnace (ACE-vacuum)
Description : Graphite vacuum (DP) furnace
Manager : Taeyeong Kim
High temperature horizontal furnace (WRHF-601D, Semitronics)
Description : Quartz tube furnace (Diameter : 20 cm, Length : 170 cm)
Manager : Taeyeong Kim
Tube furnace
Description : Quartz tube furnace (Diameter : 5 cm, Length : 100 cm)
Manager : Kibum Jung
Spin coater
Description : PR coating onto wafers or flat substrates
Manager : Minwoo Choi (moved to Prof. Bong Jae Lee’s Lab)
Thermal evaporator
Description : Physical vapor deposition (PVD) onto wafers or substrates
Manager : Rafita
Multi-purpose plasma processing system
Description : Plasma surface treatment (O2 gas connected)
Manager : Rafita