동기

전 세계적으로 고급의 마이크로-/나노공정 시설에 쉽게 접근이 가능한 연구자의 수는 많지 않음을 기억해봅시다. 우리가 현재 사용하고 있는 생산 공정과 재료는 아마 가능한 옵션들 중에 최선이 아닐 수 있습니다. 한국과학기술원 기계공학과 생산 및 계측 연구실에서는 고성능의 트랜스듀서 구현을 위해 전통적 마이크로-/나노 공정 재료에 대해 더 개선된 프로세스를 그리고 좀더 성능이 개선된 새로운 재료를 탐구하고 있습니다.

연구 관심 분야

Large scale batch fabrication of nanostructures based on silicon self-assembly, Hydrogel based micro-/nanoelectromechanical systems, Materials and processing for flexible, stretchable, and wearable devices, Nanoscale 3D printing of organic and inorganic hybrids, 3D printing for biomedical applications, Multifunctional atomic force microscopy, Single molecule force/mass spectroscopy, High-precision Laser based manufacturing and metrology, Additive manufacturing, Heat transfer.

Current ongoing research topics

1. Manufacturing & Fabrication

a. Silicon-on-nothing and germanium-on-nothing technology

  • High temperature annealing based fabrication technology for silicon-on-nothing (SON) and germanium-on-nothing (GON) structure
  • Fabrication of silicon and germanium multi-layer structures in the wafer depth direction for MEMS/NEMS device applications

  • Hybrid annealing device for laser-based local and global annealing, allowing local morphological transformation in 10 μm resolution
  • Fabrication of a 3-dimensional cavity shape via combination with a laser scanning system

  • SON-based fabrication of nanoscale silicon oxide resonator with high-sensitivity and reduced processing steps compared to conventional fabrication methods
  • Application towards water-quality sensing (metal-ion sensor) and virus discrimination by accumulated or buoyant mass measurements

  • High throughput single crystalline silicon nanoparticle fabrication by wafer scale top-down annealing fabrication process
  • Resulting uniformly-sized silicon particles retain a form factor as small as 50 nm

  • Silicon thin film transfer technology for flexible and MEMS/NEMS device fabrication
  • Single crystalline silicon nanoparticle fabrication technology for energy and MEMS/NEMS device fabrication

b. Electrochemical 4D printing

2. Instrumentation

a. Resonator-based measurement

  • Heater-integrated fluidic resonator for thermophysical properties measurements with the aid of fast/precise/efficient temperature control of a few-pL of gas or liquid phase samples.

  • Functionalized microchannels for selective measurement of a specific ionic targets

b. Sub-surface imaging

  • Near-infrared interference microscope for non-destructive thickness measurement of multilayer thin film cavity structures, up to thickness of 1 𝜇m
  • Expanded measurement range in horizontal / vertical direction in combination with an atomic force microscopy

  • Machine learning-based methodology for a non-destructive and high-throughput inspection scheme to analyze sub-surface morphology from surface nanographs

  • Multi-domain autoencoder trained to produce nanoscale topography from OM images
  • Accomplishment of three separate objectives using different components of the same deep learning model

언론보도