MEMS Equipments

  • Cleanroom (Class 100 & air shower, WoongBee. TS)

Description : Class 100 cleanroom with air shower
Manager : Taeyeong Kim
Manual :

  • High temperature vacuum furnace (ACE-vacuum)

Description : Graphite vacuum (DP) furnace
Manager : Taeyeong Kim
Manual : Vacuum furnace

  • High temperature horizontal furnace (WRHF-601D, Semitronics)

Description : Quartz tube furnace (Diameter : 20 cm, Length : 170 cm)
Manager : Taeyeong Kim
Manual : WinFus-SGU- WRHF-601D

  • Tube furnace

Description : Quartz tube furnace (Diameter : 5 cm, Length : 100 cm)
Manager : Kibum Jung
Manual : Tube furnace (Korean), Tube furnace (English)

  • Spin coater

Description : PR coating onto wafers or flat substrates
Manager : Minwoo Choi (moved to Prof. Bong Jae Lee’s Lab)
Manual :

  • Thermal evaporator

Description :  Physical vapor deposition (PVD) onto wafers or substrates
Manager : Rafita
Manual :

  • Multi-purpose plasma processing system

Description :  Plasma surface treatment (O2 gas connected)
Manager : Rafita
Manual : Operation manual_femtoscience

  • Wire bonder

Description :  Wire bonding system
Manager : Juhee Ko
Manual : 7476E Manual