MEMS Equipments
- Cleanroom (Class 100 & air shower, WoongBee. TS)
Description : Class 100 cleanroom with air shower
Manager : Juhee Ko
Reservation : juheeko@kaist.ac.kr
Manual :
- High temperature vacuum furnace (ACE-vacuum)
Description : Graphite vacuum (DP) furnace
Manager : Juhee Ko
Reservation : juheeko@kaist.ac.kr
Manual : Vacuum furnace
- High temperature horizontal furnace (WRHF-601D, Semitronics)
Description : Quartz tube furnace (Diameter : 20 cm, Length : 170 cm)
Manager : Juhee Ko
Reservation : juheeko@kaist.ac.kr
Manual : WinFus-SGU- WRHF-601D
- Tube furnace
Description : Quartz tube furnace (Diameter : 5 cm, Length : 100 cm)
Manager : Juhee Ko
Reservation : juheeko@kaist.ac.kr
Manual : Tube furnace (Korean), Tube furnace (English)
- Spin coater
Description : PR coating onto wafers or flat substrates
Manager : Taeyeong Kim
Reservation : taeyeong@kaist.ac.kr
Manual :
- Thermal evaporator
Description : Physical vapor deposition (PVD) onto wafers or substrates
Manager : Taeyeong Kim
Reservation : taeyeong@kaist.ac.kr
Manual :
- Multi-purpose plasma processing system
Description : Plasma surface treatment (O2 gas connected)
Manager : Juhee Ko
Reservation : juheeko@kaist.ac.kr
Manual : Operation manual_femtoscience
- Wire bonder
Description : Wire bonding system
Manager : Juhee Ko
Reservation : juheeko@kaist.ac.kr
Manual : 7476E Manual
English 
Korean